Deposition of copper micro-circuitry by capillary focusing

Author: Champagne Victor   Helfritch Dennis   Wienhold Erik   DeHaven Jennifer  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.6, 2013-06, pp. : 65023-65028

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Abstract