Studies of material and process compatibility in developing compact silicon vapor chambers

Author: Bhunia Avijit   Tsai Chialun   Kendig Martin W.   DeNatale Jeffrey F.   Cai Qingjun  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.6, 2013-06, pp. : 65003-65011

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Abstract