A particle-in-cell/Monte Carlo simulation of a capacitively coupled chlorine discharge

By Huang Shuo   Gudmundsson J T  

Plasma Sources Science and Technology, Vol. 22, Iss. 5, 2013-10 ,pp. : 55020-55035

IOP Publishing

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Experimental and simulation study of a capacitively coupled oxygen discharge driven by tailored voltage waveforms

By Derzsi Aranka   Lafleur Trevor   Booth Jean-Paul   Korolov Ihor   Donkó Zoltán  

Plasma Sources Science and Technology, Vol. 25, Iss. 1, 2016-02 ,pp. : 15004-15017

IOP Publishing

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Radio-frequency capacitively coupled plasmas excited by tailored voltage waveforms: comparison of experiment and particle-in-cell simulations

By Delattre Pierre-Alexandre   Lafleur Trevor   Johnson Erik   Booth Jean-Paul  

Journal of Physics D: Applied Physics, Vol. 46, Iss. 23, 2013-06 ,pp. : 235201-235213

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On the energy conservation electrostatic particle-in-cell/Monte Carlo simulation: Benchmark and application to the radio frequency discharges

By Hong-Yu Wang   Wei Jiang   Peng Sun   Ling-Bao Kong  

Chinese Physics B, Vol. 23, Iss. 3, 2014-03 ,pp. : 35204-35212

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Numerical effects on energy distribution functions in particle-in-cell simulations with Monte Carlo collisions: choosing numerical parameters

By Turner M M  

Plasma Sources Science and Technology, Vol. 22, Iss. 5, 2013-10 ,pp. : 55001-55005

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