Acceleration complex for extreme ultraviolet nanolithography based on a free-electron laser with kilowatt-scale average radiation power

Author： Syresin E.   Anchutkin V.   Budagov Yu.   Bel'skii A.   Gushchin O.   Lenskii I.   Ol'shevskii A.   Sisakyan A.   Trubnikov G.   Shelepin N.   Shirkov G.   Yurkov M.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1027-4510

Source： Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, Vol.5, Iss.3, 2011-06, pp. : 520-525

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