A Bulk Micromachined Lead Zinconate Titanate Cantilever Energy Harvester with Inter-Digital IrO x Electrodes

Author: Park Jongcheol   Park Jae Yeong  

Publisher: American Scientific Publishers

ISSN: 1533-4899

Source: Journal of Nanoscience and Nanotechnology, Vol.13, Iss.10, 2013-10, pp. : 7191-7193

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Abstract