Optimization of Tungsten Dual Poly-Metal Gates in Memory Devices with Ti/WN/WSiN Barrier Metal

Author： Sung Min-Gyu   Park Sung-Ki   Ali Ahmed I.   Kim Yong Soo  

Publisher： American Scientific Publishers

ISSN： 1533-4899

Source： Journal of Nanoscience and Nanotechnology, Vol.13, Iss.9, 2013-09, pp. : 6455-6458

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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