Analyzing the Development of N-Doped TiO 2 Thin Films Deposited by RF Magnetron Sputtering

Author： Dobromir Marius   Manole Alina Vasilica   Nica Valentin   Apetrei Radu   Neagu Maria   Luca Dumitru  

Publisher： American Scientific Publishers

ISSN： 1546-1971

Source： Sensor Letters, Vol.11, Iss.4, 2013-04, pp. : 675-678

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Effect of Deposition Time on Structure of TiAlN Thin Films Deposited by Reactive DC Magnetron Co-Sputtering

By  

Applied Mechanics and Materials, Vol. 2017, Iss. 866, 2017-07 ,pp. : 318-321

Trans Tech Publications

Access to resources Recommend Favorite

Effect of Annealing on the Morphology and Photoluminescence of ZnO Thin Films Prepared by RF Magnetron Sputtering

By  

Applied Mechanics and Materials, Vol. 2016, Iss. 851, 2016-10 ,pp. : 90-93

Trans Tech Publications

Access to resources Recommend Favorite

Development of RF magnetron sputtering method to fabricate PZT thin film actuator

By Tsuchiya K.   Kitagawa T.   Nakamachi E.  

Precision Engineering, Vol. 27, Iss. 3, 2003-07 ,pp. : 258-264

Elsevier

Access to resources Recommend Favorite

The Study of Al-N Codoped ZnO Thin Films Prepared by DC Magnetron Sputtering

By  

Applied Mechanics and Materials, Vol. 2015, Iss. 754, 2015-05 ,pp. : 591-594

Trans Tech Publications

Access to resources Recommend Favorite

Effects of Annealing Temperature on Resistance Switching Properties of ZnMn2O4 Films Deposited by Magnetron Sputtering

By  

Applied Mechanics and Materials, Vol. 2015, Iss. 778, 2015-08 ,pp. : 88-91

Trans Tech Publications

Access to resources Recommend Favorite