Ultra-low specific on-resistance vertical double-diffused metal-oxide semiconductor with a high- k dielectric-filled extended trench

Author: Pei Wang   Xiao-Rong Luo   Yong-Heng Jiang   Qi Wang   Kun Zhou   Li-Juan Wu   Xiao-Wei Wang   Jin-Yong Cai   Yin-Chun Luo   Ye Fan   Xia-Rong Hu   Yuan-Hang Fan   Jie Wei   Bo Zhang  

Publisher: IOP Publishing

ISSN: 1674-1056

Source: Chinese Physics B, Vol.22, Iss.2, 2013-02, pp. : 27305-27310

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