Cutting Behavior Simulation of a Chemical Mechanical Polishing Particle Using a Three-Dimensional Transient Atomistic FE Model with Nonlinear Spring-Damping Elements

Author: Chiu Jinn-Tong   Lin Yeou-Yih  

Publisher: American Scientific Publishers

ISSN: 1941-4900

Source: Nanoscience and Nanotechnology Letters, Vol.5, Iss.10, 2013-10, pp. : 1035-1043

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