SISO run-to-run feedback controller using triple EWMA smoothing for semiconductor manufacturing processes

Author： Fan S-K.S.   Jiang B.C.   Jen C-H.   Wang C-C.  

Publisher： Taylor & Francis Ltd

ISSN： 0020-7543

Source： International Journal of Production Research, Vol.40, Iss.13, 2002-09, pp. : 3093-3120

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Performance assessment of run-to-run control in semiconductor manufacturing based on IMC framework

By Chen Liang  

International Journal of Production Research, Vol. 47, Iss. 15, 2009-01 ,pp. : 4173-4199

Taylor & Francis Ltd

Access to resources Recommend Favorite

A run-to-run controller for product surface quality improvement

By Bao Lulu   Wang Kaibo   Wu Tianying  

International Journal of Production Research, Vol. 52, Iss. 15, 2014-08 ,pp. : 4469-4487

Taylor & Francis Ltd

Access to resources Recommend Favorite

Development of Run-To-Run (R2R) controller for the multiple-input multiple-output (MIMO) system using fuzzy control theories

By Fan S.-K. S.  

International Journal of Production Research, Vol. 45, Iss. 14, 2007-07 ,pp. : 3215-3243

Taylor & Francis Ltd

Access to resources Recommend Favorite

Online parameter estimation and run-to-run process adjustment using categorical observations

By Lin Jing   Wang Kaibo  

International Journal of Production Research, Vol. 49, Iss. 13, 2011-07 ,pp. : 4103-4117

Taylor & Francis Ltd

Access to resources Recommend Favorite

ARMAX model based run-to-run fault diagnosis approach for batch manufacturing process with metrology delay

By Wang Yan   Zheng Ying   Fang Huajing   Wang Yanwei  

International Journal of Production Research, Vol. 52, Iss. 10, 2014-05 ,pp. : 2915-2930

Taylor & Francis Ltd

Access to resources Recommend Favorite