ARMAX model based run-to-run fault diagnosis approach for batch manufacturing process with metrology delay

By Wang Yan   Zheng Ying   Fang Huajing   Wang Yanwei  

International Journal of Production Research, Vol. 52, Iss. 10, 2014-05 ,pp. : 2915-2930

Taylor & Francis Ltd

Access to resources Recommend Favorite

Online monitoring and diagnosis of batch processes: empirical model-based framework and a case study

By Cho Hyun-Woo  

International Journal of Production Research, Vol. 44, Iss. 12, 2006-06 ,pp. : 2361-2378

Taylor & Francis Ltd

Access to resources Recommend Favorite

Diagnosing batch processes with insufficient fault data: generation of pseudo batches

By Cho H.-W.  

International Journal of Production Research, Vol. 43, Iss. 14, 2005-07 ,pp. : 2997-3009

Taylor & Francis Ltd

Access to resources Recommend Favorite

Model to determine the capacity of wafer fabrications for batch-serial processes with time constraints

By Tu Ying-Mei  

International Journal of Production Research, Vol. 49, Iss. 10, 2011-05 ,pp. : 2907-2923

Taylor & Francis Ltd

Access to resources Recommend Favorite

An IDEF0 model-based intelligent fault diagnosis system for manufacturing systems

By Khoo L. P.   Ang C. L.   Zhang J.  

International Journal of Production Research, Vol. 37, Iss. 1, 1999-01 ,pp. : 35-48

Taylor & Francis Ltd

Access to resources Recommend Favorite