SURFACE MODIFICATION OF CARBONACEOUS THIN FILMS BY NF3 PLASMA AND THEIR EFFECTS ON ELECTROCHEMICAL PROPERTIES

ISSN： 1058-725X

Source： Molecular Crystals and Liquid Crystals Science and Technology. Section A. Molecular Crystals and Liquid Crystals, Vol.388, Iss.1, 2002-01, pp. : 117-122

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