From amorphous to microcrystalline silicon: Moving from one to the other by halogenated silicon plasma chemistry

Author: Bruno Giovanni   Capezzuto Pio   Giangregorio Maria   Bianco Giuseppe   Losurdo Maria  

Publisher: Taylor & Francis Ltd

ISSN: 1478-6443

Source: Philosophical Magazine, Vol.89, Iss.28-30, 2009-10, pp. : 2469-2489

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