Deposition and structural characterization of ZrO 2 and yttria-stabilized ZrO 2 films by chemical vapor deposition

Author： Kim J.S.   Marzouk H.A.   Reucroft P.J.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.254, Iss.1, 1995-01, pp. : 33-38

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