Lithographic application of diamond-like carbon films

Author: Babu S.V.   Seth J.   Ralchenko V.G.   Kononenko T.V.   Ageev V.P.   Strelnitsky V.E.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.254, Iss.1, 1995-01, pp. : 92-95

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Abstract