Preparation of cubic boron nitride films by use of electrically conductive boron carbide targets

Author: Luhje H.   Bewilogua K.   Daaud S.   Johansson M.   Hultman L.   Luthje H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.257, Iss.1, 1995-02, pp. : 40-45

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Abstract