Laser chemical vapour deposition of TiN and TiC films

Author： Feng Z.C.   Liang Y.   Hou W.L.   Zhang B.C.   Wang Y.Q.   Li L.   Cao L.X.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.257, Iss.1, 1995-02, pp. : 7-14

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