Experimental study of the growth evolution from random towards a (111) preferential orientation of PVD TiN coatings

Author: Quaeyhaegens C.   Knuyt G.   D'Haen J.   Stals L.M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.258, Iss.1, 1995-03, pp. : 170-173

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Abstract