Rapid thermal processed thin films of reactively sputtered Ta 2 O 5

Author: Pignolet A.   Rao G.M.   Krupanidhi S.B.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.258, Iss.1, 1995-03, pp. : 230-235

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Abstract