Grain size and recrystallization of TiN, ZrN, NbN, and CrN alloyed and multilayer films

Author： Andrievski R.A.   Anisimova I.A.   Anisimov V.P.   Makarov V.P.   Popova V.P.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.261, Iss.1, 1995-06, pp. : 83-86

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