Encapsulated copper interconnection devices using sidewall barriers

Author: Gardner D.S.   Vu Q.T.   Onuki J.   Kudoo K.   Misawa Y.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.262, Iss.1, 1995-06, pp. : 104-119

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Abstract