Author: Fredriksson E. Carlsson J.-O.
Publisher: Elsevier
ISSN: 0040-6090
Source: Thin Solid Films, Vol.263, Iss.1, 1995-07, pp. : 28-36
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Chemical vapour deposition of -Al 2 O 3
Thin Solid Films, Vol. 388, Iss. 1, 2001-06 ,pp. :
A chemical vapour deposition route to MoO 3 -Bi 2 O 3 thin films
By Barreca D. Rizzi G.A. Tondello E.
Thin Solid Films, Vol. 333, Iss. 1, 1998-11 ,pp. :
Al 2 O 3 formation on Si by catalytic chemical vapor deposition
By Ogita Y.-I. Iehara S. Tomita T.
Thin Solid Films, Vol. 430, Iss. 1, 2003-04 ,pp. :