Effects of chlorine on tribological properties of TiN films prepared by pulsed d.c. plasma-enhanced chemical vapor deposition

By Kawata K.   Sugimura H.   Takai O.  

Thin Solid Films, Vol. 407, Iss. 1, 2002-03 ,pp. : 38-44

Elsevier

Access to resources Recommend Favorite

Laser chemical vapour deposition of TiN and TiC films

By Feng Z.C.   Liang Y.   Hou W.L.   Zhang B.C.   Wang Y.Q.   Li L.   Cao L.X.  

Thin Solid Films, Vol. 257, Iss. 1, 1995-02 ,pp. : 7-14

Elsevier

Access to resources Recommend Favorite

Effect of interlayer composition on the tribological properties of TiC/Ti(C x ,N 1-x )/TiN anti-abrasive multi-layer coatings

By Smolik J.   Zdunek K.  

Vacuum, Vol. 55, Iss. 2, 1999-11 ,pp. : 147-151

Elsevier

Access to resources Recommend Favorite

Structural characterization of TiO 2 films obtained by high temperature oxidation of TiC single crystals

By Bellucci A.   Di Pascasio F.   Gozzi D.   Loreti S.   Minarini C.  

Thin Solid Films, Vol. 405, Iss. 1, 2002-02 ,pp. : 1-10

Elsevier

Access to resources Recommend Favorite

Multilayer TiN/Ti films for high-temperature annealing of GaAs

By Yokota K.   Nakamura K.   Satho M.   Takano H.  

Thin Solid Films, Vol. 406, Iss. 1, 2002-03 ,pp. : 87-92

Elsevier

Access to resources Recommend Favorite