Complex XRD microstructural studies of hard coatings applied to PVD-deposited TiN films Part II. Transition from porous to compact films and microstructural inhomogeneity of the layers

Author： Kuzel R.J.   Cerny R.   Valvoda V.   Blomberg M.   Merisalo M.   Kadlec S.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.268, Iss.1, 1995-11, pp. : 72-82

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