XRD microstructural study of Zn films deposited by unbalanced magnetron sputtering

Author： Valvoda V.   Musil J.   Kuzel R.J.   Chladek M.   Matous J.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.263, Iss.2, 1995-07, pp. : 150-158

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