Formation of amorphous and crystalline phases, and phase transition by solid-state reaction in Zr/Si multilayer thin films

Author: Shim J.-Y.   Kwak J.-S.   Chi E.-J.   Baik H.-K.   Lee S.-M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.269, Iss.1, 1995-11, pp. : 102-107

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract