Influence of deposition conditions on the properties of a-GeC:H and a-Ge:H films prepared by r.f. magnetron sputtering

Author: Saito N.   Yoshioka S.   Nakamura S.   Nakaaki I.   Yamaguchi T.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.269, Iss.1, 1995-11, pp. : 69-74

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Abstract