Precursor gas effect on the mechanical and optical properties of ion beam deposited diamond-like carbon films

Author: Oh J.U.   Lee K.-R.   Fun K.Y.   Eun K.Y.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.270, Iss.1, 1995-12, pp. : 173-176

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract