Effect of Sr gas pressure on growth, structure, and mechanical properties of sputtered Ti, Al, TiAl, and Ti 3 Al films

Author: Barnard J.A.   Chinmulgund M.   Inturi R.B.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.270, Iss.1, 1995-12, pp. : 260-263

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Abstract