Properties of thin TiN films deposited onto stainless steel by an in-line dry coating process

Author： Miyamoto Y. Kubo Y. Hashimoto M. Ono N. Takahashi T. Ito I. Gimondo P. Arezzo F.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.270, Iss.1, 1995-12, pp. : 253-259

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