A method for elastic modulus measurements of magnetron sputtered thin films dedicated to mechanical applications

Author： Rouzaud A.   Barbier E.   Ernoult J.   Quesnel E.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.270, Iss.1, 1995-12, pp. : 270-274

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Preparation of thermosensitive magnetron sputtered thin films

By Beensh-Marchwicka G.   Prociow E.   Posadowski W.  

Vacuum, Vol. 53, Iss. 1, 1999-05 ,pp. : 47-52

Elsevier

Access to resources Recommend Favorite

Influence of low energy ion implantation on mechanical properties of magnetron sputtered metastable (Cr,Al)N thin films

By Ulrich S.   Holleck H.   Ye J.   Leiste H.   Loos R.   Stuber M.   Pesch P.   Sattel S.  

Thin Solid Films, Vol. 437, Iss. 1, 2003-08 ,pp. : 164-169

Elsevier

Access to resources Recommend Favorite

Reactively magnetron sputtered Ti-Al-N thin films with enhanced mechanical properties

By Kourtev J.   Pascova R.  

Vacuum, Vol. 47, Iss. 10, 1996-10 ,pp. : 1197-1201

Elsevier

Access to resources Recommend Favorite

Composition, chemical bonding and mechanical properties of magnetron sputtered CN x thin films at different substrate bias

By Gioti M.   Logothetidis S.   Charitidis C.   Lefakis H.  

Vacuum, Vol. 53, Iss. 1, 1999-05 ,pp. : 53-56

Elsevier

Access to resources Recommend Favorite

Determination of the mechanical properties of r.f.-magnetron-sputtered zinc oxide thin films on substrates

By Han M.-Y.   Jou J.-H.  

Thin Solid Films, Vol. 260, Iss. 1, 1995-05 ,pp. : 58-64

Elsevier

Access to resources Recommend Favorite