The analytical solution of the contact problem of spherical indenters on layered materials: Application for the investigation of TiN films on silicon

Author: Schwarzer N.   Richter F.   Whittling M.   Swain M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.270, Iss.1, 1995-12, pp. : 371-375

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Abstract