Crystallinity properties of parylene-n affecting its use as an ILD in submicron integrated circuit technology

Author： Zhang X.   McDonald J.F.   Wang B.   Dabral S.   Chiang C.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.270, Iss.1, 1995-12, pp. : 508-511

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