Characterization of buried cobalt silicide layers in Si by MEVVA implantation

Author: Peng Q.   Wong S.P.   Wilson I.H.   Wang N.   Fung K.K.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.270, Iss.1, 1995-12, pp. : 573-577

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Abstract