Chemical mechanical polishing of PSG and BPSG dielectric films: The effect of phosphorus and boron concentration

Author: Liu C.-W.   Dai B.-T.   Yeh C.-F.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.270, Iss.1, 1995-12, pp. : 607-611

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Abstract