Controlled crystallization of LPCVD amorphous silicon

Author: Tompkins H.G.   Seddon K.   Garling L.K.   Fejes P.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.272, Iss.1, 1996-01, pp. : 93-98

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Abstract