Chemical vapour deposition and characterization of gallium oxide thin films

Author: Battiston G.A.   Gerbasi R.   Porchia M.   Bertoncello R.   Caccavale F.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.279, Iss.1, 1996-06, pp. : 115-118

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Abstract