Twin facing target sputtering system for the deposition of multilayer and alloy films

By Swarnalatha M.   Mohan S.  

Vacuum, Vol. 48, Iss. 1, 1997-01 ,pp. : 15-19

Elsevier

Access to resources Recommend Favorite

Computational analyses of a magnetron sputtering system with a ferrromagnetic target

By Kashiwagi M.   Ido S.  

Vacuum, Vol. 53, Iss. 1, 1999-05 ,pp. : 33-36

Elsevier

Access to resources Recommend Favorite

Preparation of Pb(Zr,Ti)O 3 thin films by RF-magnetron sputtering with single stoichiometric target: structural and electrical properties

By Thomas R.   Mochizuki S.   Mihara T.   Ishida T.  

Thin Solid Films, Vol. 413, Iss. 1, 2002-06 ,pp. : 65-75

Elsevier

Access to resources Recommend Favorite

Effect of deposition conditions and substrate position on the properties of superconducting YBa 2 Cu 3 O thin films prepared in a facing-target sputtering system

By Zeng X.T.   Wong H.K.  

Vacuum, Vol. 51, Iss. 3, 1998-11 ,pp. : 323-327

Elsevier

Access to resources Recommend Favorite

Deformation structures under indentations in TiN/NbN single-crystal multilayers deposited by magnetron sputtering at different bombarding ion energies

By Molina-Aldareguia J. M.   Lloyd S. J.   Odén M.   Joelsson T.   Hultman L.   Clegg W. J.  

Philosophical Magazine. A. Physics of Condensed Matter. Defects and Mechanical Properties, Vol. 82, Iss. 10, 2002-07 ,pp. : 1983-1992

Taylor & Francis Ltd

Access to resources Recommend Favorite