Surface and interface studies of titanium silicide formation

Author: Wee A.T.S.   Huan A.C.H.   Osipowicz T.   Lee K.K.   Thian W.H.   Tan K.L.   Hogan R.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.283, Iss.1, 1996-09, pp. : 130-134

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Abstract