Low temperature growth of r.f. reactively planar magnetron-sputtered AlN films

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Correlation between hardness and embedded argon content of magnetron sputtered chromium films

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Surface passivation of silicon by rf magnetron-sputtered silicon nitride films

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The infrared properties of magnetron-sputtered diamond-like thin films

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Effects of ion flux on the properties of dc magnetron-sputtered stainless steel films

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