Structural characterization of SiC films prepared by dynamic ion mixing

Author: Zaytouni M.   Riviere J.P.   Denanot M.F.   Allain J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.287, Iss.1, 1996-10, pp. : 1-7

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Abstract