New Ge substrate cleaning method for Si 1-x-y Ge x C y MOMBE growth

Author: Akane T.   Okumura H.   Tanaka J.   Matsumoto S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.294, Iss.1, 1997-02, pp. : 153-156

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Abstract