Fabrication of a nanosize Si-tip coated with a thin diamond-like carbon film

Author: Jung M.-Y.   Kim D.W.   Choi S.S.   Kim Y.-S.   Kuk Y.   Park K.C.   Jang J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.294, Iss.1, 1997-02, pp. : 157-159

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Abstract