Infrared-sensitive SiGe-Si heterojunction internal photoemission detectors produced by rapid thermal chemical vapour deposition

Author: Tillack B.   Banisch R.   Pressel K.   Barth R.   Erzgraber H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.294, Iss.1, 1997-02, pp. : 354-356

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Abstract