High-rate dual-target d.c. magnetron sputter deposition of electrochromic MoO 3 films

Author: Kharrazi M.   Azens A.   Kullman L.   Granqvist C.G.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.295, Iss.1, 1997-02, pp. : 117-121

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Abstract