Influence of etch stops on the microstructure of porous silicon layers

Author: Billat S.   Thonissen M.   Arens-Fischer R.   Berger M.G.   Kruger M.   Luth H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.297, Iss.1, 1997-04, pp. : 22-25

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Abstract