Porous silicon layers used for gas sensor applications

Author: Foucaran A.   Pascal-Delannoy F.   Giani A.   Sackda A.   Combette P.   Boyer A.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.297, Iss.1, 1997-04, pp. : 317-320

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Abstract