Analysis of the depth homogeneity of p-PS by reflectance measurements

Author： Thonissen M.   Berger M.G.   Billat S.   Arens-Fischer R.   Kruger M.   Luth H.   Theisz W.   Hillbrich S.   Grosse P.   Lerondel G.   Frotscher U.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.297, Iss.1, 1997-04, pp. : 92-96

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