Preparation of thin porous silicon layers by stain etching

Author: Dimova-Malinovska D.   Sendova-Vassileva M.   Tzenov N.   Kamenova M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.297, Iss.1, 1997-04, pp. : 9-12

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Abstract