High quality optoelectronic grade epitaxial AlN films on -Al 2 O 3 , Si and 6H-SiC by pulsed laser deposition

Author： Vispute R.D.   Narayan J.   Budai J.D.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.299, Iss.1, 1997-05, pp. : 94-103

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